Study and analysis of novel RF MEMS switched capacitor

  • Authors

    • K Vikas
    • S Sunithamani
    • M Yagnika
    • S Siva Krishna
    • S Avanthi
    2018-05-29
    https://doi.org/10.14419/ijet.v7i2.31.13392
  • .
  • In this paper we have designed and analyzed shunt capacitive fixed-fixed RF MEMS switch to maintain low actuation voltage. The pull - in voltage of the proposed switch is 7.7V for 2 um air gap. The electromagnetic analysis for the designed structure is, return loss is -23dB in the range of 1-40 GHz, insertion loss is -0.04dB at a frequency range of 1-40 GHz and isolation is - 38.5dB obtained at a frequency of 23.5 GHz. Mechanical analysis for the designed structure is also performed using FEM tool.
  • References

    1. [1] Rebeiz GM, RF MEMS: theory, design and technology, Wiley, New Jersey, (2003).

      [2] Huff GH & Bernhard JT, “Integration of Packaged RF MEMS Switches With Radiation Pattern Reconfigurable Square Spiral Microstrip Antennas†IEEE Transactions on Antennas and Propagation, Vol.54, No.2, (2006).

      [3] Rebeiz GM & Muldavin JB, “RF MEMS switches and switch circuitsâ€, IEEE Microw Mag, Vol.2, No.4,(2001), pp.59–71

      [4] Persano A, Cola A, Angelis G, Taurino A, Siciliano P & Quaranta F, “Capacitive RF MEMS switches with Tantalum based materialsâ€, J MicroelectromechSyst, Vol.20, No.2, (2011), pp.365–370.

      [5] Pacheco S, Nguyen CT & Katehi LPB, “Design of Low Actuation Voltage RF MEMS Switchâ€, IEEE MTT-S International Microwave Symposium Digest, Baltimore, (2000), pp.165-168

      [6] Cabral JM & Holmes AS, “A Novel Seesaw-Type RF MEMS Switchâ€, Proc. Melecon, Malaga, Spain, (2006), pp. 288-292

      [7] Mishra B & Panigrahi R, “Highly Stabilized MEMS Switch with Low Actuation Voltageâ€, International Journal of Recent Trends in Engineering, Vol.2, No.7, (2009), pp.120-122

      [8] Cho IJ, Song T & Baek SH, “A Low-Voltage and Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of Electromagnetic and Electrostatic Forcesâ€, IEEE Transactions on Microwave Theory and Techniques, Vol.53, No.7,(2005), pp.2450-2457

      [9] Giacomozzi F, Calaza C, Colpo S, Mulloni V, Collini A, Margesini B, Farinelli P, Casini F, Marcelli R, Mannocchi G & Vietzorreck L, “Development of high con coff ratio RF MEMS shunt switchesâ€, Romanian Journal of information science and technology, Vol.11, No.2,(2008), pp.143-151.

      [10] Casini F, Marcelli R, Mannocchi G & Vietzorreck L, ‘Tecnological and Design Improvements for RF MEMS Shunt Switchesâ€, IEEE International Semiconductor Conference, (2007), pp.263-266

      [11] Girija Sravani K & Srinivasa Rao K, “Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meandersâ€, Microsystems technologies, Springer Publisher, (2018).

      [12] Laxminaryana T, GirijaSravani K & Srinivasa Rao K, “A Micro Level Electrostatically Actuated Cantilever and Metal Contact Based Series RF MEMS Switch for Multi-Band Applicationsâ€, Cogent Engineering Journal, Taylor and Francis Publishers, Scopus and SCI Index, (2017).

  • Downloads

  • How to Cite

    Vikas, K., Sunithamani, S., Yagnika, M., Siva Krishna, S., & Avanthi, S. (2018). Study and analysis of novel RF MEMS switched capacitor. International Journal of Engineering & Technology, 7(2.31), 34-36. https://doi.org/10.14419/ijet.v7i2.31.13392