Mems based integrated temperature and humidity sensor for agricultural monitoring

  • Authors

    • B Priyadarisshini
    • D Sindhaniselvi
    • T Shanmuganatham
    2018-06-08
    https://doi.org/10.14419/ijet.v7i2.33.15536
  • Micro Cantilever, Temperature, Humidity, Displacement, Pressure.

  • Abstract

    Temperature and Humidity are interrelated parameters in the agricultural field to monitor the growth of the crop. This paper is proposed to design the MEMS based integrated temperature and humidity sensor for the cardinal temperature range of 35°F to 105°F and the relative humidity range of 60 % to 100% which is suitable for cultivating crops range in our country. These interrelated parameters are to be main-tained for the better quality and high yield of the crop in the agricultural field. The integrated sensor is designed using simple cantilever and its analyzed. Further, sensitivity is enhanced with perforation in the sensing layer and dielectric layer and ribs in the dielectric layer.

     

     


     

  • References

    1. [1] Rong-Hua Ma, Chia-Yen Lee, Yu-Hsiang Wang, Hao-Jen Chen “Microcantilever-based weather station for temperature, humidity and flow rate measurement,†Microsyst Technol, vol. 14, pp. 971-977, November 2007.

      [2] Jie Liu, Mangilal Agarwal, Kody Varahramyan,Ernest S. Berney IV, Wayne D. Hodo “Polymer- based microsensor for soil moisture measuremnet,†Sensors and Actuators, vol. B129, pp. 599-604, September 2007.

      [3] Lung-Tai Chen, Chia – Yen Lee, and Wood-hi cheng, “MEMS-based humidity sensor with integrated temperature compensation mechanism,†Sensors and Actuators, vol. A147, pp. 522-528, July 2008.

      [4] Ashish, Kumari Nidhi Gupta, T.Shanmuganantham, “Design of Temperature Sensors For Enviromental Applicationsâ€, Int. Journal of Engineering Trends and Technology (IJETT) –Volume 4 Issue 10 - Oct 2013.

      [5] B.Priyadarisshini, D.Sindhanaiselvi, T. shanmuganatham, “Design and dimension optimization of high sensitive microcantilever as humidity sensor,†IEEE International Conference on Emerging Devices and Smart Systems (ICEDSS), 02-03, March 2018.

      [6] D.Sindhanaiselvi, T.Shanmuganantham, “Double Boss Sculptured Diaphragm Employed Piezoresistive Mems Pressure Sensor With Silicon-On-Insulator (SOI)†Journal of Engineering Science and Technology, School of Engineering, Taylor’s University., Vol. 12, July 2017

      [7] Marie Joan Syndhya, D.Sindhanaiselvi, T.Shanmuganantham, “Design and Analysis of Rectangular type Pizoresistive Microcantilever for Antigen Detectionâ€, International Journal of Control Theory and Application, International Science Press, Vol. 10, 2017.

      [8] Marie Joan Syndhya, D.Sindhanaiselvi, T.Shanmuganantham, “ Investigation on Piezoresistive Micro Cantilever Design for Blood Glucose Sensingâ€, International Journal of Control Theory and Application, International Science Press , Vol. 10, 2017.

      [9] D.Sindhanaiselvi, T.Shanmuganantham, “Investigation on Performance of Piezoelectric Beam Based Mems Actuator for Focussing of Micro Lens in Mobile Applicationâ€, IEEE International Conference on circuits and systems, 2017.

      [10] D.Sindhanaiselvi,R.Ananda Natarajan, T.Shanmuganantham, “Performance Analysis of Sculptured for Low Pressure MEMS Sensorsâ€, I.J. of Applied Mechanics and Materials , Vols. 592-594, 2014, pp. 2193-2198.

      [11] A.Nallathambi, T. Shanmuganantham, and D.Sindhanaiselvi, “Design and Analysis of MEMS based Piezoresistive Pressure sensor for Sensitivity Enhancement,†Journal of Materials today, Elsevier, vol.5, pp.1897-1903, 2018.

      [12] A. Nallathambi, T. Shanmuganantham, “Modeling and Analysis of a Multi Bossed Beam-Membrane Sensor for Environmental Applications,†Transactions on Electrical and Electronic Materials, Springer, vol. 18, No. 1, pp.25-29, Feb. 2017 (Indexed by SCI).

  • Downloads

  • How to Cite

    Priyadarisshini, B., Sindhaniselvi, D., & Shanmuganatham, T. (2018). Mems based integrated temperature and humidity sensor for agricultural monitoring. International Journal of Engineering & Technology, 7(2.33), 934-936. https://doi.org/10.14419/ijet.v7i2.33.15536

    Received date: 2018-07-13

    Accepted date: 2018-07-13

    Published date: 2018-06-08