Thermal Chemically Deposited Zno Nanostructures: Influence of Post-Deposition Annealing Temperature on Ph Sensor Performance

  • Abstract
  • Keywords
  • References
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  • Abstract

    Zinc oxide (ZnO) nanostructures were synthesized via thermal chemical deposition (TCVD) method and applied as the sensing membrane of an extended-gate field effect transistor (EGFET) pH sensor.  The ZnO nanostructures undergone a post-deposition heat treatment with the temperature ranging from 200-500 °C for 15 min in air ambient. The influence of the post-deposition heat treatment on the physical and pH sensing characteristics was investigated. The FESEM images showed that the surface morphology of the samples were dependent on post-annealing treatment. The as-deposited sample showed the biggest grain size and non-uniformed structures. Applying the post-annealing heat treatment caused the surface morphology to become denser and uniform. The most ideal temperature for the heat treatment for EGFET pH sensor application was found at 300 °C resulting in a pH sensitivity of 48.2 mV/pH with 0.9646 linearity.




  • Keywords

    ZnO ;TCVD ; Annealing Temperature ; EGFET ; pH Sensor

  • References

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Article ID: 15919
DOI: 10.14419/ijet.v7i3.11.15919

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