SIVA KUMAR, M.; SRINIVAS RAO, K.; KUMAR TULAS, Sanath; PRASAD, G R K; HARI KISHORE, K. Cantillever based MEMS pressure sensor. International Journal of Engineering & Technology, [S. l.], v. 7, n. 1.5, p. 234–236, 2017. DOI: 10.14419/ijet.v7i1.5.9153. Disponível em: https://sciencepubco.com/index.php/ijet/article/view/9153.. Acesso em: 5 dec. 2024.