B. Chiu, S.-C. Hu, A. Shiue, Y.-Y. Shiue, and Z.-Y. Huang, “Pre-particle filtration and moisture control by efficient purging in various inlet and outlet of a 450 mm wafer front-opening unified pod”, IJET, vol. 4, no. 2, pp. 304–310, Apr. 2015, doi: 10.14419/ijet.v4i2.4415.